May 2, 2007
Development of “TFT Disconnection Repair Equipment”
[ Capable of repairing fine pattern of 10μm (0.01mm) or less in width ]
NTN Corporation ( hereafter NTN ) is marketing new products for the repair of flat panel displays ( FPD ) in the field of precision equipment. Now, NTN has developed “TFT Disconnection Repair Equipment,” which repairs the disconnection of fine wiring on the TFT ( Thin Film Transistor ) panels of liquid crystal displays.
With liquid crystal displays getting larger and higher in resolution, the technology, that repairs the disconnection defect of fine wiring generated during manufacturing the TFT panels, is in high demand. Currently, laser CVD equipment is widely used for the repair of TFT wiring disconnection. However, because it is expensive and requires frequent maintenance, an alternative technology is being sought after. One such alternative technology is a micro dispenser or injection type process. These are being investigated, but they cannot draw a fine line of 10μm ( 0.01mm ) or less in width, and there are some other problems such as clogging.
The fine line drawing process, which NTN has established, consists of the following three processes. First, the mask is made by forming through-holes, which are matched with drawing figures on the film material. Second, the mask is pressed onto the panel with a painting needle that has paste adhered on its tip. Third, paste is applied through the mask. With this method, it becomes possible to draw fine lines of 10μm or less in width, which was difficult to do with the method of applying the paste with the painting needle, a method that NTN has already developed. In addition, lasers working to form the mask make it possible for one application to be enough for the even the complicated repair process of figures like U or L.
This equipment is exhibited at the Flat Panel Display, R & D and Manufacturing Technology Expo ( FINETECH JAPAN 2007 ) held at Tokyo Big Sight from April 11, 2007.
[ Features ]
| 1 | It is possible to draw fine a line using a film mask | |
| By applying paste through the film mask, a fine line of 10μm in width can be created. | ||
| 2 | All kinds of patterns can be realized | |
| Because the lasers can form any pattern for masking, it is possible to draw letters such as L or U. | ||
[ Repair Object ]
| · | Repair of disconnection of fine wiring on liquid crystal TFT panel | |
| · | Repair of black matrix on liquid crystal color filter panel | |
[ Applications ]
| · | Defect repair of wiring disconnection on TFT liquid crystal display | |
| · | Defect repair of black matrix on liquid crystal color filter | |
| · | Forming and repair of other fine patterns | |